ACCESSORIES
TEMPERATURE CONTROL SYSTEMS
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Galden®:
High heat transfer efficiency with excellent dielectric
properties. To go to the Galden® site CLICK HERE.		   Galden Products  
Deionizing Resin Tank:
Typically “Culligan” tank is used for deionizing water to high resistivity. 		  Culligan Deionizing Tank  
Short Loop:
Installed on unused channel. (Recommended on all units, MDP in specific.) 		  Short Loop  
Tubing:
Used for connecting the chiller/Heat Exchanger to the semiconductor fabrication tool. (Vacuum Jacketed, Buna-n with and without Insulation, High Temperature Material.) 		  tubing  
Standpipe:
Using a standpipe filling the system has never been easier. Eliminates trapped air from process fluid, increases heat transfer and prevents damage to pumps. 		  Stand Pipe  
Fill/Drain Tank:
Stainless steel vessel used for filling and draining the system without any loss of fluid or vapor. Eliminates DI/EG, Galden® and Fluorinerts™ spills in the fab.		   Fill Drain Tank