Advanced Thermal Sciences (ATS)

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Key Features

- Powerful cooling capacity options
(Configurations to 60kW)
- High temperature range – up to 200 deg. C.
- Energy saving control system
- Smart LCD user friendly interface
- Multiple interfaces (Analog/Digital)
- Slim body/Small foot print
- SEMI S2 / F47 and CE mark certification

HTX-10A Specification

Temp. range	+30 to +200 deg.C (Facililty water @ +20 deg.C)
temp. accuracy	±1.0 deg.C
Heat medium	GALDEN HT-270
Cooling capacity	22kW at +200 deg.C
Pump capacity	76L/min at 0.2MPa
Utility water	19-26L/min (at +20deg.C)
Special spec	Accepted
Interface	Analog/Digital
Dimensions	W:457 x D:914 x H:1213mm
Power supply	AC200-208V 3φ 20A 50/60Hz

Note: All specifications subject to change without notice

HTX Pump Curve

Click on image to enlarge