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Key Features

- Dual Channel Chiller
- Fast heating & cooling ramp rates for increased throughput
- Smart LCD user friendly interface
- Reduced power & facility water consumption
- Double sealed & contained pumps
- Slim body (width:406mm/15.98in)
- SEMI S2 / F47 and CE mark certified

NX-21A Specification

Temp. range 0 to +60deg.C/Dual Channel Chiller
Temp. accuracy ±1 deg.C
Heat medium GALDEN/Fluorinert/DI-EG
Cooling capacity Ch-1: 3kW (at +20deg.C)
Ch-2 : 6kW (at +20deg.C)
Pump capacity: DI-EG Ch-1: 9.4L/min (at 0.55MPa)
Ch-2: 18.9L/min (at 0.55MPa)
Pump capacity: GALDEN Ch-1: 13.2L/min (at 0.55MPa)
Ch-2: 26.5L/min (at 0.55MPa)
Utility water 30L/min (at +20deg.C)
Special spec Accepted
Interface Analog/Digital
Dimensions W:406 x D:914 x H:1549mm
Power supply AC208V 3φ 60A 50/60Hz

Note: All specifications subject to change without notice

 

NX-21A  Cooling Capacity Curve

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 NX-21A Pump Curve

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