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Key Features

- Fast heating & cooling ramp rates for increased throughput
- Elevated facility water operation (to +30 deg. C)
- Double sealed & contained pumps
- Patented thermal management design
- SEMI S2 / F47 and CE mark certified
SX-21A Specification

Temp. range 0 to +65deg.C/Single Channel Chiller
Temp. accuracy ±1 deg.C
Heat medium GALDEN/Fluorinert/DI-EG
Cooling capacity 60Hz:8kW (at +20deg.C)
50Hz:6.8kW (at +20deg.C
Pump capacity 60Hz:15L/min (at 0.5MPa)
50Hz:15L/min (at 0.35MPa)
Utility water 30L/min (at +20deg.C)
Special spec Accepted
Interface Analog/Digital
Dimensions W:665 x D:536 x H:1016mm
Power supply AC208V 1φ 20A 50/60Hz

Note: All specifications subject to change without notice

SX-21A Pump Curve

Click on image to enlarge

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